a) Overall view of the CMOS-MEMS high-frequency resonator. (b
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Descrição
A chip-scale frequency down-conversion realized by MEMS-based
Sensors, Free Full-Text
Micromachines, Free Full-Text
Device under test (DUT)—CMOS-MEMS SAW resonator
Frontiers CMOS-MEMS Thermal-Piezoresistive Resonators and
AlN MEMS filters with extremely high bandwidth widening capability
Developing Better Resonators for CMOS Technology
Leveraging high-volume CMOS for MEMS-based frequency control
CMOS-MEMS resonators and their applications
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Design, fabrication, characterization and reliability study of
CMOS-MEMS Resonators
Developing Better Resonators for CMOS Technology
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